A:Thetemperature of the waste gas of MOCVD process is not high. A special waste gastreating system is necessary, since the waste gas component is complicated. Morecautious treatment for the waste gas of GaAs-based MOCVD is need...
A:Skilled operation and maintenance for the MOCVD systemand the special gas transportation system are necessary. Relative experienceand English reading ability are also needed.
