Resistance Heater And Evaporation Coating Machine
Resistance evaporation heater:
The device is suitable for various kinds of evaporation coating equipment . the evaporation heater has the advantages of high working temperature , less vacuum pollution , good repeatablity , fast speed of heat and cool.
Features :
temperature(max):1700℃
Heating Rating :100℃/min
Cooling Rating: 15min(from 1700℃ to 400℃)
Leakage : 1*E-10mbar·l/s
Evaporation Coating Equipment:
According to the main vacuum chamber requirements can becustomized ,the main parameters
ultimate pressure in mbar | ≤6×10-5Pa |
time to reach | 40min reach to 9×10-4Pa |
Resistance heating temperature | ≤1700℃ |
Electron beam evaporation source (or resistance evaporation source) | Selectable |
Coupled source | RF 500w /pcs |
Induction evaporation source | 30KW |
Substrate table | Φ200mm;rotation, 0-20RPM continuous adjustable |
Pump type | Valve Pump, Roots Pump, Dual diffusion Pump, Cryo-pump |
Control system | automatic control |
Control model | manual /PLC automatic control |
To shortage of water for pump、electrode. overvoltage and over current circuit and other abnormal condition alarm and to implement the corresponding protective measures; logic program perfect interlock protection system