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MOCVD Systems

             

MOCVD Systems

Type:3*2"、6*2“、37*2”、72*2”

Application: Blue and Green LEDS, UV Led, LaserDiodes, Photodetector, Power electronic devices

Properties:

Using BDS ( Buffer Distributed Spray) gasdistribution system technology, uniformity and repeatability of high gasflow can be achieved.

 

Using the self-developed sheet heateror tungsten filament heater, the surface  temperature of thegraphite susceptor can reach more than 1300 ℃

 

By using the online infrared temperatureinstrument, the controllability of process temperature can be realized.

 

The upper computer software can be compatible for the processprograms of mainstream MOCVD systems.

 

Robot using for catching graphite susceptor automatically is optional.

 

The core components are self-developed and the cost of manufacture and maintenance for the system is low.


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